Shutdown stsetch2 SNF 2008-08-02 17:19:46: software does not respond at all

kupnik at snf.stanford.edu kupnik at snf.stanford.edu
Sat Aug 2 17:19:46 PDT 2008


Did 20 min O2 clean first, worked fine, also all the loading. Then loaded my
real wafer. Tool loaded wafer, but did not start etching. I tried to unload and then
wafer came out but tool still showed on the screen that the wafer is still in etching
chamber. Then the warning
"the process module controller lost communication with devicenet node9"
came and the software did not respond anymore.




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