Problem stsetch2 SNF 2008-08-29 12:45:52: wafer trapped inside

yoonjin at snf.stanford.edu yoonjin at snf.stanford.edu
Fri Aug 29 12:45:52 PDT 2008


Tool loaded wafer, didn't start etching. Tried to unload wafer but, failed. 
warning, the process module controller lost communication with device net node 9
LLC3alarm code:026, expected wafer isn't detected.




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