From eenriquez at snf.stanford.edu Fri Feb 1 11:42:06 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Feb 2008 11:42:06 -0800 Subject: Problem stsetch2 SNF 2008-01-31 16:12:42: DO NOT USE - Wafer fell off chuck and is inside chamber Message-ID: Recovered user's wafer and placed in a wafer container next to the system. Cleaned chamber and ran an O2 clean with no problems. From eenriquez at snf.stanford.edu Fri Feb 1 11:42:18 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Feb 2008 11:42:18 -0800 Subject: Problem stsetch2 SNF 2008-01-31 16:11:56: ****DO NOT USE****** My wafer fell off the chuck and resides in chamber Message-ID: Recovered user's wafer and placed in a wafer container next to the system. Cleaned chamber and ran an O2 clean with no problems. From eenriquez at snf.stanford.edu Fri Feb 1 11:42:38 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 1 Feb 2008 11:42:38 -0800 Subject: Comment stsetch2 SNF 2007-12-21 14:21:00: Replaced the loadlock lid lift Message-ID: Noted From rostam at snf.stanford.edu Fri Feb 1 17:37:32 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 1 Feb 2008 17:37:32 -0800 Subject: Problem stsetch2 SNF 2008-02-01 17:37:32: alarm Message-ID: apc pressure fell below the warning point. cleared the error, but it came back. From eenriquez at snf.stanford.edu Mon Feb 4 08:50:36 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Feb 2008 08:50:36 -0800 Subject: Problem stsetch2 SNF 2008-02-01 17:37:32: alarm Message-ID: I don't know which recipe the user ran. I ran the maintenance O2 recipe. Had the APC pressure warning 1 time at the beginning of the recipe but was able to clear. From rostam at snf.stanford.edu Mon Feb 4 18:15:19 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 4 Feb 2008 18:15:19 -0800 Subject: Problem stsetch2 SNF 2008-02-04 18:15:18: carier wafer recipe Message-ID: I want to use carier wafer recipe. When I started the batch, I received an error message saying the recipe can not be downloaded. From rostam at snf.stanford.edu Mon Feb 4 18:15:39 2008 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 4 Feb 2008 18:15:39 -0800 Subject: Problem stsetch2 SNF 2008-02-04 18:15:39: apc pressure Message-ID: apc pressure problem still exists From eenriquez at snf.stanford.edu Tue Feb 5 10:40:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Feb 2008 10:40:27 -0800 Subject: Problem stsetch2 SNF 2008-02-04 18:15:39: apc pressure Message-ID: Adjusted pressure warning tolerance From eenriquez at snf.stanford.edu Tue Feb 5 10:47:54 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 5 Feb 2008 10:47:54 -0800 Subject: Comment stsetch2 SNF 2008-02-05 10:47:54: Carrier wafer recipe is defective Message-ID: Unable to load the carrier wafer recipe. Loaded 10 other recipes with no problems. Will speak to Ed M. about reviewing the recipe. From joongsun at snf.stanford.edu Tue Feb 5 21:19:20 2008 From: joongsun at snf.stanford.edu (joongsun at snf.stanford.edu) Date: Tue, 5 Feb 2008 21:19:20 -0800 Subject: Shutdown stsetch2 SNF 2008-02-05 21:19:20: Wafer broken Message-ID: Broken during the etching. Broken wafer inside. From eenriquez at snf.stanford.edu Wed Feb 6 08:59:14 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 6 Feb 2008 08:59:14 -0800 Subject: Shutdown stsetch2 SNF 2008-02-05 21:19:20: Wafer broken Message-ID: Recovered user's broken wafer. Cleaned the chamber and ran an O2 clean. From emyers at snf.stanford.edu Thu Feb 14 15:09:38 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Feb 2008 15:09:38 -0800 Subject: Comment stsetch2 SNF 2008-02-05 10:47:54: Carrier wafer recipe is defective Message-ID: This is a locked recipe. Can't down load with any changes. From emyers at snf.stanford.edu Thu Feb 14 15:09:46 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Feb 2008 15:09:46 -0800 Subject: Problem stsetch2 SNF 2008-02-04 18:15:18: carier wafer recipe Message-ID: This is a locked recipe. Can't down load with any changes. From emyers at snf.stanford.edu Thu Feb 14 15:10:46 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Feb 2008 15:10:46 -0800 Subject: Comment stsetch2 SNF 2008-02-14 15:10:45: Template Recipes Message-ID: Remember, template recipes will not down load if any changes are made. You need to create a new recipe to make changes.