Problem stsetch2 SNF 2008-01-31 16:12:42: DO NOT USE - Wafer fell off chuck and is inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Feb 1 11:42:06 PST 2008


Recovered user's wafer and placed in a wafer container next to the system.  Cleaned chamber and ran an O2 clean with no problems.




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