From mislam at snf.stanford.edu Sat Jan 19 18:11:42 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 19 Jan 2008 18:11:42 -0800 Subject: Problem stsetch2 SNF 2008-01-19 18:11:41: He flow controller alarm - out of He ? Message-ID: Process won't run, gas stabilization times out. He pressure is very low (117mT) and the pressure gauge for He shows there is no He flow. Most likely He bottle is empty. From eenriquez at snf.stanford.edu Tue Jan 22 09:51:30 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jan 2008 09:51:30 -0800 Subject: Problem stsetch2 SNF 2008-01-19 18:11:41: He flow controller alarm - out of He ? Message-ID: Ran mislam recipe for 10 minutes with no problems From malekos at snf.stanford.edu Thu Jan 31 16:11:56 2008 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Thu, 31 Jan 2008 16:11:56 -0800 Subject: Problem stsetch2 SNF 2008-01-31 16:11:56: ****DO NOT USE****** My wafer fell off the chuck and resides in chamber Message-ID: Unfortunately my device wafer was dropped during the transfer. I can see it inside the chamber and it doesn't look like it has been damaged. This is one of my device wafers and unfortunately I do not have time to stick around to rescue it. I did not shut down the tool because there is a chance that someone may be able to pump the system down and successful recover my wafer. I am off to Reno and will be back next week. If my wafer can be saved and placed in a safe spot until I return I will be much abliged! THANK YOU - THANK YOU - THANK YOU!!! From malekos at snf.stanford.edu Thu Jan 31 16:12:43 2008 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Thu, 31 Jan 2008 16:12:43 -0800 Subject: Problem stsetch2 SNF 2008-01-31 16:12:42: DO NOT USE - Wafer fell off chuck and is inside chamber Message-ID: Please do not use until my wafer can be successfully recovered! Thank you!