From mislam at snf.stanford.edu Sat Jul 5 12:44:28 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 5 Jul 2008 12:44:28 -0700 Subject: Problem stsetch2 SNF 2008-07-05 12:44:28: LL won't vent Message-ID: Seems like LL has pumping problem, won't pump below 101mT and so the vent won't start (80mT base presure required) From cbaxter at snf.stanford.edu Sun Jul 6 10:55:21 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 6 Jul 2008 10:55:21 -0700 Subject: Problem stsetch2 SNF 2008-07-05 12:44:28: LL won't vent Message-ID: Load lock was pump was low on oil. From mislam at snf.stanford.edu Mon Jul 7 12:16:32 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 7 Jul 2008 12:16:32 -0700 Subject: Problem stsetch2 SNF 2008-07-07 12:16:32: Won't unload wafer Message-ID: Seems like machine lost communication with devicenet. Not respoding to any operation command. From eenriquez at snf.stanford.edu Mon Jul 7 14:56:50 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Jul 2008 14:56:50 -0700 Subject: Shutdown stsetch2 SNF 2008-07-07 14:56:50: Lost communication with handler Message-ID: Unable to clear a device net fault. Need to troubleshoot. From eenriquez at snf.stanford.edu Tue Jul 8 09:24:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jul 2008 09:24:33 -0700 Subject: Shutdown stsetch2 SNF 2008-07-07 14:56:50: Lost communication with handler Message-ID: Reset the handler computer. Ran O2 clean. From eenriquez at snf.stanford.edu Tue Jul 8 09:25:12 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jul 2008 09:25:12 -0700 Subject: Problem stsetch2 SNF 2008-07-07 12:16:32: Won't unload wafer Message-ID: Reset the handler computer .Recovered user's wafer. Ran O2 clean. From eenriquez at snf.stanford.edu Tue Jul 8 09:25:19 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jul 2008 09:25:19 -0700 Subject: Comment stsetch2 SNF 2008-06-09 11:09:26: Wet cleaned chamber Message-ID: Noted From eenriquez at snf.stanford.edu Tue Jul 8 09:25:27 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 8 Jul 2008 09:25:27 -0700 Subject: Comment stsetch2 SNF 2008-05-30 14:52:30: Replaced cooling fan Message-ID: Noted From mislam at snf.stanford.edu Sat Jul 12 16:29:09 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 12 Jul 2008 16:29:09 -0700 Subject: Shutdown stsetch2 SNF 2008-07-12 16:29:09: Down due to power glitch Message-ID: My wafer inside the chamber From cbaxter at snf.stanford.edu Sun Jul 13 16:42:25 2008 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 13 Jul 2008 16:42:25 -0700 Subject: Comment stsetch2 SNF 2008-07-13 16:42:25: Power glitch Message-ID: Power up the tool, problem with the terminal it won't power on. From eenriquez at snf.stanford.edu Mon Jul 14 10:43:41 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 10:43:41 -0700 Subject: Comment stsetch2 SNF 2008-07-13 16:42:25: Power glitch Message-ID: Defective monitor power supply. Trying to locate a 12 VDC 4A power brick. From eenriquez at snf.stanford.edu Mon Jul 14 10:43:53 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 10:43:53 -0700 Subject: Comment stsetch2 SNF 2008-07-14 10:43:53: Update Message-ID: Defective monitor power supply. Trying to locate a 12 VDC 4A power brick. From eenriquez at snf.stanford.edu Mon Jul 14 14:55:46 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jul 2008 14:55:46 -0700 Subject: Comment stsetch2 SNF 2008-07-14 14:55:46: Update Message-ID: Mike has ordered a new power supply for the monitor. It should be here tomorrow. From eenriquez at snf.stanford.edu Tue Jul 15 15:09:39 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Jul 2008 15:09:39 -0700 Subject: Comment stsetch2 SNF 2008-07-15 15:09:39: Update Message-ID: Installed monitor power supply. Monitor OK now. Problem with the insert heater not turning on and the foreline heater temperature (bad sensor). Was able to recover the user's wafer. Need further troubleshooting. From eenriquez at snf.stanford.edu Fri Jul 18 15:08:57 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Jul 2008 15:08:57 -0700 Subject: Comment stsetch2 SNF 2008-07-18 15:08:54: Update Message-ID: Defective temperature controller. We will order the part on Monday. From eenriquez at snf.stanford.edu Tue Jul 22 14:55:04 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jul 2008 14:55:04 -0700 Subject: Shutdown stsetch2 SNF 2008-07-12 16:29:09: Down due to power glitch Message-ID: Replaced the defective heater controller. Also installed a new backside Helium lip seal. Ran a 45 O2 clean with no problems. From eenriquez at snf.stanford.edu Tue Jul 22 14:55:29 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jul 2008 14:55:29 -0700 Subject: Comment stsetch2 SNF 2008-07-14 10:43:53: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jul 22 14:55:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jul 2008 14:55:34 -0700 Subject: Comment stsetch2 SNF 2008-07-14 14:55:46: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jul 22 14:55:39 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jul 2008 14:55:39 -0700 Subject: Comment stsetch2 SNF 2008-07-18 15:08:54: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jul 22 14:55:44 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 22 Jul 2008 14:55:44 -0700 Subject: Comment stsetch2 SNF 2008-07-15 15:09:39: Update Message-ID: Archived From mislam at snf.stanford.edu Wed Jul 23 00:58:07 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 23 Jul 2008 00:58:07 -0700 Subject: Shutdown stsetch2 SNF 2008-07-23 00:58:05: wafer did not unload Message-ID: From eenriquez at snf.stanford.edu Wed Jul 23 09:27:34 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Jul 2008 09:27:34 -0700 Subject: Shutdown stsetch2 SNF 2008-07-23 00:58:05: wafer did not unload Message-ID: Recovered user's wafer. Cycled wafers and ran maintenance O2 clean with no problems. From peichen at snf.stanford.edu Tue Jul 29 15:58:36 2008 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Tue, 29 Jul 2008 15:58:36 -0700 Subject: Shutdown stsetch2 SNF 2008-07-29 15:58:35: wafer in the chamber Message-ID: The carasoul didn't catch the wafer after processing. My wafer is currently trapped in the chamber. From eenriquez at snf.stanford.edu Wed Jul 30 09:14:08 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Jul 2008 09:14:08 -0700 Subject: Comment stsetch2 SNF 2008-07-30 09:14:08: Update Message-ID: Unable to Login. to the maintenance mode. My engineering/maintenance access level does not seem to work any more. Reset the computer but it did not help. Contacted STS about providing us with the backdoor password. Should have a reply by tomorrow. From eenriquez at snf.stanford.edu Thu Jul 31 11:32:21 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 31 Jul 2008 11:32:21 -0700 Subject: Shutdown stsetch2 SNF 2008-07-29 15:58:35: wafer in the chamber Message-ID: Recovered the user's wafer. Cycled wafers and ran an O2 clean. From eenriquez at snf.stanford.edu Thu Jul 31 11:32:33 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 31 Jul 2008 11:32:33 -0700 Subject: Comment stsetch2 SNF 2008-07-30 09:14:08: Update Message-ID: Archived From peichen at snf.stanford.edu Thu Jul 31 23:15:50 2008 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Thu, 31 Jul 2008 23:15:50 -0700 Subject: Shutdown stsetch2 SNF 2008-07-31 23:15:49: wafer trapped in chamber again Message-ID: Exactly the same thing happened again... It looks like my wafer is sitting on the chuck, but the machine fail to catch it. Yesterday and today I used peichen-iso recipe, and it both fail to pick the second processed wafer.