From gyama at snf.stanford.edu Mon Mar 3 09:58:46 2008 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 3 Mar 2008 09:58:46 -0800 Subject: Problem stsetch2 SNF 2008-03-03 09:58:45: thinks there is a wafer in chamber Message-ID: From eenriquez at snf.stanford.edu Tue Mar 4 08:57:09 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 Mar 2008 08:57:09 -0800 Subject: Problem stsetch2 SNF 2008-03-03 09:58:45: thinks there is a wafer in chamber Message-ID: No wafer seen on chuck. Deleted wafer from display. From korgan at snf.stanford.edu Sat Mar 15 11:41:16 2008 From: korgan at snf.stanford.edu (korgan at snf.stanford.edu) Date: Sat, 15 Mar 2008 11:41:16 -0700 Subject: Problem stsetch2 SNF 2008-03-15 11:41:16: RF unit overheating - will not strike a plasma Message-ID: From korgan at snf.stanford.edu Sat Mar 15 11:43:50 2008 From: korgan at snf.stanford.edu (korgan at snf.stanford.edu) Date: Sat, 15 Mar 2008 11:43:50 -0700 Subject: Problem stsetch2 SNF 2008-03-15 11:43:50: Disregard problem submitted 2008/03/15 11:41:16 - Report meant for STS 1 Message-ID: From mislam at snf.stanford.edu Sun Mar 16 00:11:26 2008 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 16 Mar 2008 00:11:26 -0700 Subject: Problem stsetch2 SNF 2008-03-16 00:11:25: keyboard not responding Message-ID: can not change recipe, mouse work but not the keyboard. Only ket that works is backspace. From eenriquez at snf.stanford.edu Mon Mar 17 06:47:28 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Mar 2008 06:47:28 -0700 Subject: Problem stsetch2 SNF 2008-03-15 11:41:16: RF unit overheating - will not strike a plasma Message-ID: Logged on wrong tool From eenriquez at snf.stanford.edu Mon Mar 17 06:47:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Mar 2008 06:47:35 -0700 Subject: Problem stsetch2 SNF 2008-03-15 11:43:50: Disregard problem submitted 2008/03/15 11:41:16 - Report meant for STS 1 Message-ID: Logged on wrong tool From eenriquez at snf.stanford.edu Mon Mar 17 07:59:59 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 17 Mar 2008 07:59:59 -0700 Subject: Problem stsetch2 SNF 2008-03-16 00:11:25: keyboard not responding Message-ID: Defragmented the hard drive and restarted the program. From huangzb at snf.stanford.edu Sun Mar 23 15:15:26 2008 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sun, 23 Mar 2008 15:15:26 -0700 Subject: Problem stsetch2 SNF 2008-03-23 15:15:26: 13.56 MHz coil cannot reach set point Message-ID: 13.56 MHz coil cannot reach set point. I run zubin- O2 clean receipe and cannot strike plasma, the real power is below 10% of the set point power. I run zubin smooth shallow and get plasma but the power for the 13.56MHz coil is still much lower (<10%) than set point. From mtang at snf.stanford.edu Mon Mar 24 15:24:55 2008 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Mar 2008 15:24:55 -0700 Subject: Shutdown stsetch2 SNF 2008-03-24 15:24:54: RF problem Message-ID: RF problem reported. System should not be used until it is checked out. From emyers at snf.stanford.edu Tue Mar 25 13:03:13 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 25 Mar 2008 13:03:13 -0700 Subject: Shutdown stsetch2 SNF 2008-03-24 15:24:54: RF problem Message-ID: Reviewed error log. No RF errors were listed. Ran both of the recipes which were reported as a problem. No faults were observed. From emyers at snf.stanford.edu Tue Mar 25 13:03:31 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Tue, 25 Mar 2008 13:03:31 -0700 Subject: Problem stsetch2 SNF 2008-03-23 15:15:26: 13.56 MHz coil cannot reach set point Message-ID: Reviewed error log. No RF errors were listed. Ran both of the recipes which were reported as a problem. No faults were observed. From huangzb at snf.stanford.edu Thu Mar 27 16:50:27 2008 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Thu, 27 Mar 2008 16:50:27 -0700 Subject: Problem stsetch2 SNF 2008-03-27 16:50:27: keyboard not working Message-ID: cannot change recipe parameters From mdickey at snf.stanford.edu Fri Mar 28 07:52:43 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 Mar 2008 07:52:43 -0700 Subject: Comment stsetch2 SNF 2008-03-28 07:52:43: keyboard Message-ID: Gary ran without any keyboard problems From huangzb at snf.stanford.edu Fri Mar 28 14:49:32 2008 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Fri, 28 Mar 2008 14:49:32 -0700 Subject: Problem stsetch2 SNF 2008-03-28 14:49:32: particles found from the backside of the wafer Message-ID: After running zubin iso recipe, find white particles on the backside of the wafer. From eenriquez at snf.stanford.edu Mon Mar 31 09:01:23 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Mar 2008 09:01:23 -0700 Subject: Comment stsetch2 SNF 2008-03-31 09:01:22: Update Message-ID: Cleaned the chamber. Now system is heating up. Still need to run O2 plasma. From mdickey at snf.stanford.edu Mon Mar 31 09:58:05 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 31 Mar 2008 09:58:05 -0700 Subject: Problem stsetch2 SNF 2008-03-27 16:50:27: keyboard not working Message-ID: Keyboard works fine now From mdickey at snf.stanford.edu Mon Mar 31 09:58:22 2008 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 31 Mar 2008 09:58:22 -0700 Subject: Problem stsetch2 SNF 2008-03-28 14:49:32: particles found from the backside of the wafer Message-ID: Cleaned chamber and ran O2 clean. Ready for use