Problem stsetch2 SNF 2008-03-03 09:58:45: thinks there is a wafer in chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Mar 4 08:57:09 PST 2008

Previous message: Problem stsetch2 SNF 2008-03-03 09:58:45: thinks there is a wafer in chamber
Next message: Problem stsetch2 SNF 2008-03-15 11:41:16: RF unit overheating - will not strike a plasma
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

No wafer seen on chuck.  Deleted wafer from display.

Previous message: Problem stsetch2 SNF 2008-03-03 09:58:45: thinks there is a wafer in chamber
Next message: Problem stsetch2 SNF 2008-03-15 11:41:16: RF unit overheating - will not strike a plasma
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch2-pcs mailing list