Problem stsetch2 SNF 2008-03-15 11:41:16: RF unit overheating - will not strike a plasma
korgan at snf.stanford.edu
korgan at snf.stanford.edu
Sat Mar 15 11:41:16 PDT 2008
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Problem stsetch2 SNF 2008-03-03 09:58:45: thinks there is a wafer in chamber
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Problem stsetch2 SNF 2008-03-15 11:41:16: RF unit overheating - will not strike a plasma
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Problem stsetch2 SNF 2008-03-03 09:58:45: thinks there is a wafer in chamber
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Problem stsetch2 SNF 2008-03-15 11:41:16: RF unit overheating - will not strike a plasma
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