Problem stsetch2 SNF 2008-03-23 15:15:26: 13.56 MHz coil cannot reach set point

huangzb at snf.stanford.edu huangzb at snf.stanford.edu
Sun Mar 23 15:15:26 PDT 2008


13.56 MHz coil cannot reach set point.
I run zubin- O2 clean receipe and cannot strike plasma, the real power is below 10% of the set point power.
I run zubin smooth shallow and get plasma but the power for the 13.56MHz coil is still much lower (<10%) than set point.




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