Comment stsetch2 SNF 2008-03-31 09:01:22: Update

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Mar 31 09:01:23 PDT 2008

Previous message: Problem stsetch2 SNF 2008-03-28 14:49:32: particles found from the backside of the wafer
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Cleaned the chamber.  Now system is heating up. Still need to run O2 plasma.

Previous message: Problem stsetch2 SNF 2008-03-28 14:49:32: particles found from the backside of the wafer
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