From eenriquez at snf.stanford.edu Wed Nov 5 18:58:29 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 Nov 2008 18:58:29 -0800 Subject: Shutdown stsetch2 SNF 2008-11-05 18:58:29: Down for Wafer mapping Message-ID: The wafer mapping routine is not functioning. Still trying to troubleshoot. From eenriquez at snf.stanford.edu Fri Nov 7 14:25:14 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 7 Nov 2008 14:25:14 -0800 Subject: Comment stsetch2 SNF 2008-11-07 14:25:13: Update Message-ID: Repaired the wafer mapping problem by adjusting the carrousel position sensor. Now having problem with the arm extend/retract motor timing out. Might need to replace the motor. Also having problem with the loadlock not pumping down. From eenriquez at snf.stanford.edu Mon Nov 10 14:18:59 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 10 Nov 2008 14:18:59 -0800 Subject: Comment stsetch2 SNF 2008-11-10 14:18:59: Update Message-ID: Adjusted the arm @ chamber sensor position. Now arm does not error when going into the chamber. Load lock still only pumps down to 3 torr. The leak appears to be in the pump line between the roughing valve and the pump. An external tc gauge reads about 25 mT at the pump but about 3 torr at the pump side of the LL roughing valve. Another problem is the wafer lift times out when going to the down position. From eenriquez at snf.stanford.edu Fri Nov 14 08:49:09 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 14 Nov 2008 08:49:09 -0800 Subject: Comment stsetch2 SNF 2008-11-14 08:49:09: Update Message-ID: Suspect a defective I/O interface chip. Will order part today. From eenriquez at snf.stanford.edu Tue Nov 18 13:52:37 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 Nov 2008 13:52:37 -0800 Subject: Comment stsetch2 SNF 2008-11-18 13:52:36: Update Message-ID: Still having a problem initializing the motor driver board after replacing the encoder motor. New motor driver board should be here by Friday. Also wrote a PO for field service. They should be here early next week. From eenriquez at snf.stanford.edu Thu Nov 20 09:02:35 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 20 Nov 2008 09:02:35 -0800 Subject: Comment stsetch2 SNF 2008-11-20 09:02:35: Turbo backing pump problem Message-ID: The pump has seized up and tripping the breaker. Sending pump out today for repair. It should be ready by next Wednesday. From eenriquez at snf.stanford.edu Tue Nov 25 14:19:13 2008 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 Nov 2008 14:19:13 -0800 Subject: Comment stsetch2 SNF 2008-11-25 14:19:12: Update Message-ID: Field service scheduled to be here on Monday (if they receive a PO by 11/25). Pump package should also be here on Monday.