From eenriquez at snf.stanford.edu  Wed Oct  1 16:53:54 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 1 Oct 2008 16:53:54 -0700
Subject: Shutdown stsetch2 SNF 2008-09-29 19:20:32: wafer (NOT broken) stuck inside chamber 
Message-ID: <mailman.527.1356283387.4670.stsetch2-pcs@snf.stanford.edu>

Replaced the defective wafer lift "down" position sensor.  Ran O2 plasma clean 2 times with no problems.



From eenriquez at snf.stanford.edu  Wed Oct  1 16:54:06 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 1 Oct 2008 16:54:06 -0700
Subject: Comment stsetch2 SNF 2008-09-30 14:47:06: Update
Message-ID: <mailman.528.1356283387.4670.stsetch2-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Fri Oct 10 07:25:03 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 10 Oct 2008 07:25:03 -0700
Subject: Comment stsetch2 SNF 2008-09-17 09:18:23: Maintenance  activity
Message-ID: <mailman.529.1356283387.4670.stsetch2-pcs@snf.stanford.edu>

Archived



From mtan at snf.stanford.edu  Fri Oct 24 13:11:28 2008
From: mtan at snf.stanford.edu (mtan at snf.stanford.edu)
Date: Fri, 24 Oct 2008 13:11:28 -0700
Subject: Shutdown stsetch2 SNF 2008-10-24 13:11:27: broken wafer
Message-ID: <mailman.530.1356283387.4670.stsetch2-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Sat Oct 25 09:20:27 2008
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Sat, 25 Oct 2008 09:20:27 -0700
Subject: Problem stsetch2 SNF 2008-10-25 09:20:27: Power Off
Message-ID: <mailman.531.1356283387.4670.stsetch2-pcs@snf.stanford.edu>

Found the system power off. Power on the system and
reset the pc. I was not able to remove the broken wafer 
inside the chamber, I could not login in the system pc.



From eenriquez at snf.stanford.edu  Mon Oct 27 14:06:42 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 27 Oct 2008 14:06:42 -0700
Subject: Comment stsetch2 SNF 2008-10-27 14:06:42: Update
Message-ID: <mailman.532.1356283387.4670.stsetch2-pcs@snf.stanford.edu>

Restarted the system.  Gate valve air line fitting broke off.  Need to replace the fitting.



From cbaxter at snf.stanford.edu  Mon Oct 27 16:43:54 2008
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 27 Oct 2008 16:43:54 -0700
Subject: Problem stsetch2 SNF 2008-10-27 16:43:53: can't find the right fitting..
Message-ID: <mailman.533.1356283387.4670.stsetch2-pcs@snf.stanford.edu>




From eenriquez at snf.stanford.edu  Tue Oct 28 11:28:39 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 28 Oct 2008 11:28:39 -0700
Subject: Problem stsetch2 SNF 2008-10-27 16:43:53: can't find the right fitting..
Message-ID: <mailman.534.1356283387.4670.stsetch2-pcs@snf.stanford.edu>

Replaced the fitting



From eenriquez at snf.stanford.edu  Tue Oct 28 11:28:49 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 28 Oct 2008 11:28:49 -0700
Subject: Comment stsetch2 SNF 2008-10-27 14:06:42: Update
Message-ID: <mailman.535.1356283387.4670.stsetch2-pcs@snf.stanford.edu>

Archived



From eenriquez at snf.stanford.edu  Tue Oct 28 11:29:32 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 28 Oct 2008 11:29:32 -0700
Subject: Problem stsetch2 SNF 2008-10-25 09:20:27: Power Off
Message-ID: <mailman.536.1356283388.4670.stsetch2-pcs@snf.stanford.edu>

Restarted the system.



From eenriquez at snf.stanford.edu  Tue Oct 28 11:30:44 2008
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 28 Oct 2008 11:30:44 -0700
Subject: Shutdown stsetch2 SNF 2008-10-24 13:11:27: broken wafer
Message-ID: <mailman.537.1356283388.4670.stsetch2-pcs@snf.stanford.edu>

Cleaned chamber and ran an O2 plasma.