Shutdown stsetch2 SNF 2008-09-29 19:20:32: wafer (NOT broken) stuck inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Oct 1 16:53:54 PDT 2008


Replaced the defective wafer lift "down" position sensor.  Ran O2 plasma clean 2 times with no problems.




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