Shutdown stsetch2 SNF 2008-10-24 13:11:27: broken wafer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Tue Oct 28 11:30:44 PDT 2008
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Shutdown stsetch2 SNF 2008-10-24 13:11:27: broken wafer
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Cleaned chamber and ran an O2 plasma.
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Shutdown stsetch2 SNF 2008-10-24 13:11:27: broken wafer
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Problem stsetch2 SNF 2008-10-25 09:20:27: Power Off
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