From wessmith at snf.stanford.edu Tue Feb 17 19:25:16 2009 From: wessmith at snf.stanford.edu (wessmith at snf.stanford.edu) Date: Tue, 17 Feb 2009 19:25:16 -0800 Subject: Problem stsetch2 SNF 2009-02-17 19:25:15: System non-responsive Message-ID: The system will not allow me to vent, map carousel, etc. I had a wafer handling fault that I was able to clear by aborting the batch. After I removed my wafers, the machine still indicated that a wafer was present. I tried to manually remove the wafer, but the machine faulted when it did not sense a wafer in the carrier. From eenriquez at snf.stanford.edu Wed Feb 18 14:54:40 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 18 Feb 2009 14:54:40 -0800 Subject: Problem stsetch2 SNF 2009-02-17 19:25:15: System non-responsive Message-ID: The process chamber door was open. Cleared the alarm and cycled a wafer in Auto using the Maintenance O2 clean recipe. From emyers at snf.stanford.edu Mon Feb 23 10:45:03 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 23 Feb 2009 10:45:03 -0800 Subject: Shutdown stsetch2 SNF 2009-02-23 10:45:02: Platten Lift Message-ID: Platten lift problem which will not reset. From eenriquez at snf.stanford.edu Mon Feb 23 14:14:57 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 23 Feb 2009 14:14:57 -0800 Subject: Shutdown stsetch2 SNF 2009-02-23 10:45:02: Platten Lift Message-ID: Found the CDA valve closed at the tool. Turned CDA valve back on and reset the system. Ran O2 maintenance clean with no problems.