Problem stsetch2 SNF 2009-02-17 19:25:15: System non-responsive

wessmith at snf.stanford.edu wessmith at snf.stanford.edu
Tue Feb 17 19:25:16 PST 2009


The system will not allow me to vent, map carousel, etc. I had a wafer handling fault that I was able to clear by aborting the batch. After I removed my wafers, the machine still indicated that a wafer was present. I tried to manually remove the wafer, but the machine faulted when it did not sense a wafer in the carrier. 




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