Problem stsetch2 SNF 2009-02-17 19:25:15: System non-responsive

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Feb 18 14:54:40 PST 2009


The process chamber door was open.  Cleared the alarm and cycled a wafer in Auto using the Maintenance O2 clean recipe.




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