Comment stsetch2 SNF 2009-07-17 15:31:56: Update PM

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 17 15:31:56 PDT 2009


Replaced a leaky view port o-ring.  Leak rate was about 10 mT/min.  Ran O2 plasma for 3 hours. User is running the tool to check his process.




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