Comment stsetch2 SNF 2009-07-17 16:32:36: Results

mmessana at snf.stanford.edu mmessana at snf.stanford.edu
Fri Jul 17 16:32:37 PDT 2009


Ran isotropic etch recipe to thin wafer. It seemed faster than before by about 20%. No info on etch profile. No info on uniformity becuase the wafer didn't start out uniform.




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