Problem stsetch2 SNF 2009-07-31 15:13:17: High leak rate

eenriquez at eenriquez at
Fri Jul 31 15:13:18 PDT 2009

Chamber leak rate ~ 10 mT/min -  Need to replace the magnetic confinement o-ring and rebuild the lower electrode.  Field service will be available on Aug 17th.
Backside He cooling flow rate is also a little high at 18 sccm.  The flow is normally around 10 sccm and the shutdown limit is 25 sccm.

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