From till at snf.stanford.edu Wed Jun 3 16:18:32 2009 From: till at snf.stanford.edu (till at snf.stanford.edu) Date: Wed, 3 Jun 2009 16:18:32 -0700 Subject: Shutdown stsetch2 SNF 2009-06-03 16:18:32: handler got stuck Message-ID: Wafer is on handler. Error says handling movement took to long and is not responding anymore. From cbaxter at snf.stanford.edu Wed Jun 3 20:01:54 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 3 Jun 2009 20:01:54 -0700 Subject: Comment stsetch2 SNF 2009-06-03 20:01:53: Load arm Message-ID: The load arm is stuck inside the chamber, I could not re-track it back to the load lock. From eenriquez at snf.stanford.edu Thu Jun 4 10:08:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Jun 2009 10:08:34 -0700 Subject: Shutdown stsetch2 SNF 2009-06-03 16:18:32: handler got stuck Message-ID: Pneumatic line to the door popped off. Re-installed the line and recovered the user's wafer. Cycled wafers with no problems. Ran an O2 plasma. From eenriquez at snf.stanford.edu Thu Jun 4 10:08:42 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 4 Jun 2009 10:08:42 -0700 Subject: Comment stsetch2 SNF 2009-06-03 20:01:53: Load arm Message-ID: Pneumatic line to the door popped off. Re-installed the line and recovered the user's wafer. Cycled wafers with no problems. Ran an O2 plasma. From mislam at snf.stanford.edu Sun Jun 7 12:27:44 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 7 Jun 2009 12:27:44 -0700 Subject: Problem stsetch2 SNF 2009-06-07 12:27:43: LL error. won't load Message-ID: Heard a N2 line snaping noise. There is a loose N2 line between LL and chamber. From damodei at snf.stanford.edu Mon Jun 8 05:29:56 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Mon, 8 Jun 2009 05:29:56 -0700 Subject: Shutdown stsetch2 SNF 2009-06-08 05:29:55: Shutdown due to N2 line problem Message-ID: Same problem as previous user. Problem described by previous user sounds serious; system should not be used until it is repaired. From eenriquez at snf.stanford.edu Mon Jun 8 11:28:47 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:28:47 -0700 Subject: Shutdown stsetch2 SNF 2009-06-08 05:29:55: Shutdown due to N2 line problem Message-ID: Repaired broken gate valve air line. Cycled wafer and ran O2 plasma. From eenriquez at snf.stanford.edu Mon Jun 8 11:28:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Jun 2009 11:28:52 -0700 Subject: Problem stsetch2 SNF 2009-06-07 12:27:43: LL error. won't load Message-ID: Repaired broken gate valve air line. Cycled wafer and ran O2 plasma. From eenriquez at snf.stanford.edu Wed Jun 24 08:57:32 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 24 Jun 2009 08:57:32 -0700 Subject: Shutdown stsetch2 SNF 2009-06-24 08:57:31: Performing PM Message-ID: