Shutdown stsetch2 SNF 2009-06-03 16:18:32: handler got stuck
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Jun 4 10:08:34 PDT 2009
Pneumatic line to the door popped off. Re-installed the line and recovered the user's wafer. Cycled wafers with no problems. Ran an O2 plasma.
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