Shutdown stsetch2 SNF 2009-06-03 16:18:32: handler got stuck

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jun 4 10:08:34 PDT 2009


Pneumatic line to the door popped off.  Re-installed the line and recovered the user's wafer.  Cycled wafers with no problems.  Ran an O2 plasma.




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