Shutdown stsetch2 SNF 2009-06-08 05:29:55: Shutdown due to N2 line problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jun 8 11:28:47 PDT 2009


Repaired broken gate valve air line.  Cycled wafer and ran O2 plasma.




More information about the stsetch2-pcs mailing list