From srikantv at snf.stanford.edu  Tue Mar 31 00:02:49 2009
From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu)
Date: Tue, 31 Mar 2009 00:02:49 -0700
Subject: Shutdown stsetch2 SNF 2009-03-31 00:02:48: LLC3 handler alarm code 031
Message-ID: <mailman.574.1356283388.4670.stsetch2-pcs@snf.stanford.edu>

Wafer does not enter etch chamber after loading and pumping. There is  a leak and alarm is raised.



From eenriquez at snf.stanford.edu  Tue Mar 31 08:30:48 2009
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 31 Mar 2009 08:30:48 -0700
Subject: Shutdown stsetch2 SNF 2009-03-31 00:02:48: LLC3 handler alarm code 031
Message-ID: <mailman.575.1356283388.4670.stsetch2-pcs@snf.stanford.edu>

Chamber gate valve pneumatic line broke off.  Replaced the line and cycled the system with no problems.