From rhenn at snf.stanford.edu Wed May 13 21:22:14 2009 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Wed, 13 May 2009 21:22:14 -0700 Subject: Problem stsetch2 SNF 2009-05-13 21:22:13: BSG pressure Alarm Message-ID: Alarm raised - bsg pressure controller fell below the alarm speicified. Set at 10000 mTorr value reached = 1006 mTorr. I was running recipe RH SOI GC1 w/C4f8 long. Error occurred on two different wafers. From rostam at snf.stanford.edu Thu May 14 20:31:59 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Thu, 14 May 2009 20:31:59 -0700 Subject: Shutdown stsetch2 SNF 2009-05-14 20:31:58: can't stabilize to recipe setpoints Message-ID: red alarm: system can not stabilize to recipe set points after 5:00 min yellow alarm: BSG pressure controller BSG pressure controller pressure fell below the warning level specified in tolerance recipe The setpoint was 10000 mTorr, the warning band below setpoint was 9000 mTorr, the value reached was 87.9 Yesterday night, another user told me he couldn't process his wafers. From eenriquez at snf.stanford.edu Fri May 15 08:43:07 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 May 2009 08:43:07 -0700 Subject: Problem stsetch2 SNF 2009-05-13 21:22:13: BSG pressure Alarm Message-ID: Main Helium valve located behind Drytek 4 was shut-off. Re-opened the valve and ran an O2 plasma clean From eenriquez at snf.stanford.edu Fri May 15 08:43:20 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 15 May 2009 08:43:20 -0700 Subject: Shutdown stsetch2 SNF 2009-05-14 20:31:58: can't stabilize to recipe setpoints Message-ID: Main Helium valve located behind Drytek 4 was shut-off. Re-opened the valve and ran an O2 plasma clean From emyers at snf.stanford.edu Fri May 15 13:16:29 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 15 May 2009 13:16:29 -0700 Subject: Comment stsetch2 SNF 2009-05-15 13:16:29: Needs PM Message-ID: Inspected inside of chamber: Outside sealing Viton oring found to be flaking, particles shed onto chuck Base chamber pressure with turbopump on was 6mT (should be <0mT) --- this level of chamber leak likely part of process shifting observed on tool as well as resist burning/cracking Ceramic inside chamber noted as dirty, needs to be cleaned for usage, ceramic nees to be removed for cleaning at Pentagon Noted a hot spot on ceramic near upper part of ceramic Inner o-rings are also Viton which need to be replaced during PM Current pumping cannot attain less than 1.2Torr on chamber, turbopump cannot cross-over at this pressure PM kit required to return tool to process usage, baseline ASE tests need to be perfomed after PM STS - Steve Vargo From emyers at snf.stanford.edu Fri May 15 13:18:15 2009 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 15 May 2009 13:18:15 -0700 Subject: Shutdown stsetch2 SNF 2009-05-15 13:18:14: Not Pumping Down Message-ID: The tool would not pump down following inspection by STS. Changed chamber O-ring, to no avail. From eenriquez at snf.stanford.edu Tue May 19 14:57:01 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 May 2009 14:57:01 -0700 Subject: Shutdown stsetch2 SNF 2009-05-15 13:18:14: Not Pumping Down Message-ID: Found leak at the chamber door o-ring (door between the loadlock and the chamber). Re-zeroed the chamber manometer. Ran an O2 plasma clean. New chamber door o-ring should be here by Thursday. Should be OK to run the system because the loadlock and chamber are both under vacuum during normal processing. From eenriquez at snf.stanford.edu Tue May 19 15:01:04 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 19 May 2009 15:01:04 -0700 Subject: Problem stsetch2 SNF 2009-05-19 15:01:03: Chamber door leak Message-ID: Should be OK to run the system because the loadlock and chamber are both under vacuum during normal processing. You should check your process however, before committing your actual devices. A new door seal should be here by Thursday. From eenriquez at snf.stanford.edu Fri May 22 09:37:54 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 22 May 2009 09:37:54 -0700 Subject: Problem stsetch2 SNF 2009-05-19 15:01:03: Chamber door leak Message-ID: Replaced chamber door seal. Ran O2 plasma. From mislam at snf.stanford.edu Sun May 24 15:30:32 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sun, 24 May 2009 15:30:32 -0700 Subject: Shutdown stsetch2 SNF 2009-05-24 15:30:31: Wafer did not unload from the chamber Message-ID: Carrier came back empty From eenriquez at snf.stanford.edu Tue May 26 10:50:26 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 26 May 2009 10:50:26 -0700 Subject: Shutdown stsetch2 SNF 2009-05-24 15:30:31: Wafer did not unload from the chamber Message-ID: Vented the chamber and retrived user's wafer. Cycled several wafers without any problems. Ran an O2 plasma for 30 min. From rhenn at snf.stanford.edu Tue May 26 17:51:12 2009 From: rhenn at snf.stanford.edu (rhenn at snf.stanford.edu) Date: Tue, 26 May 2009 17:51:12 -0700 Subject: Shutdown stsetch2 SNF 2009-05-26 17:51:11: wierd noise - loose hose Message-ID: Making a wierd noise. hose came loose. From cbaxter at snf.stanford.edu Tue May 26 18:06:33 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 26 May 2009 18:06:33 -0700 Subject: Shutdown stsetch2 SNF 2009-05-26 17:51:11: wierd noise - loose hose Message-ID: Re-connect air line for gate slit door..