Problem stsetch2 SNF 2009-11-17 03:02:09: WAFER BROKEN
barlian at snf.stanford.edu
barlian at snf.stanford.edu
Tue Nov 17 03:02:09 PST 2009
Previous message:
Problem stsetch2 SNF 2009-11-12 22:33:48: Loadlock won't vent.
Next message:
Problem stsetch2 SNF 2009-11-17 03:02:09: WAFER BROKEN
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
part of my wafer was broken inside the process chamber
Previous message:
Problem stsetch2 SNF 2009-11-12 22:33:48: Loadlock won't vent.
Next message:
Problem stsetch2 SNF 2009-11-17 03:02:09: WAFER BROKEN
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch2-pcs mailing list