Problem stsetch2 SNF 2009-11-17 03:02:09: WAFER BROKEN

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Nov 17 14:36:07 PST 2009

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Removed broken wafer pieces and wiped down the chuck.  Replace several worn out teflon screw caps on the clamp assembly.

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Next message: Shutdown stsetch2 SNF 2009-11-19 11:06:25: Chamber has been modified
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