Problem stsetch2 SNF 2009-11-22 12:41:56: pneumatic hose lose? - wafer won't transfer

jsnapp at snf.stanford.edu jsnapp at snf.stanford.edu
Sun Nov 22 12:41:57 PST 2009


Got alarm that wafer won't transfer from load-lock to process chamber.
This was concurrent with very loud hissing (I am assuming from a lose/detached pneumatic line) which ended when transfer operation was aborted.




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