Problem stsetch2 SNF 2009-11-22 12:41:56: pneumatic hose lose? - wafer won't transfer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Nov 23 11:54:56 PST 2009


Repaired the broken pneumatic line.  Recovered the users wafer and placed it in the container.  Cycled wafers and ran an O2 plasma.




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