Problem stsetch2 SNF 2009-11-22 12:41:56: pneumatic hose lose? - wafer won't transfer
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Nov 23 11:54:56 PST 2009
Repaired the broken pneumatic line. Recovered the users wafer and placed it in the container. Cycled wafers and ran an O2 plasma.
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