From eenriquez at snf.stanford.edu Fri Oct 2 15:55:09 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Oct 2009 15:55:09 -0700 Subject: Comment stsetch2 SNF 2009-10-02 15:55:07: Update PM Message-ID: Completed annual PM. Electrode temperature test result was within STS specification (< 77 C). Now waiting for process qualification. From eenriquez at snf.stanford.edu Fri Oct 2 15:55:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 2 Oct 2009 15:55:33 -0700 Subject: Comment stsetch2 SNF 2009-10-02 15:55:33: Need process qualification Message-ID: From mcvittie at snf.stanford.edu Fri Oct 2 18:18:54 2009 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 2 Oct 2009 18:18:54 -0700 Subject: Shutdown stsetch2 SNF 2009-09-30 19:14:14: Annual PM Message-ID: The PM was completed. The chamber leak rate is now below 1um/min. Note this leak rate is different then the He leak rate report at the bottom lt hand corner for each run. My measurement of the peak wafer temperature after a specified plasma run is not as low as before the PM. At the wafer center the measured peak temperature was between 54 and 60 C. It is now between 66 and 71C. We think the problem was cause by a damage indium gasket which is on order. It will be replaced once it comes in. Note the the STS spec for the tool is a peak temp of below 77C. I will doing further characterization over the next week. In the mean time the tool will be taken off shutdown. Jim From shott at snf.stanford.edu Mon Oct 5 14:57:29 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:57:29 -0700 Subject: Problem stsetch2 SNF 2009-07-31 15:13:17: High leak rate Message-ID: High leak rate resolved by Elmer and STS during rebuild of lower chamber. As I understand it, the most problematic souce of leakage was the O-ring that seals the gas injection port. John From shott at snf.stanford.edu Mon Oct 5 14:57:43 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:57:43 -0700 Subject: Problem stsetch2 SNF 2009-09-18 18:01:03: failed leak check Message-ID: High leak rate resolved by Elmer and STS during rebuild of lower chamber. As I understand it, the most problematic souce of leakage was the O-ring that seals the gas injection port. John From shott at snf.stanford.edu Mon Oct 5 14:57:49 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:57:49 -0700 Subject: Problem stsetch2 SNF 2009-09-18 18:32:24: failed leak check Message-ID: High leak rate resolved by Elmer and STS during rebuild of lower chamber. As I understand it, the most problematic souce of leakage was the O-ring that seals the gas injection port. John From shott at snf.stanford.edu Mon Oct 5 14:57:58 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:57:58 -0700 Subject: Problem stsetch2 SNF 2009-09-21 13:47:44: failing leak check Message-ID: High leak rate resolved by Elmer and STS during rebuild of lower chamber. As I understand it, the most problematic souce of leakage was the O-ring that seals the gas injection port. John From shott at snf.stanford.edu Mon Oct 5 14:58:11 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 5 Oct 2009 14:58:11 -0700 Subject: Problem stsetch2 SNF 2009-09-25 12:06:13: failed leak test Message-ID: High leak rate resolved by Elmer and STS during rebuild of lower chamber. As I understand it, the most problematic souce of leakage was the O-ring that seals the gas injection port. John From eenriquez at snf.stanford.edu Thu Oct 8 14:41:00 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:41:00 -0700 Subject: Problem stsetch2 SNF 2009-09-14 11:56:59: more helium leak rate alarms Message-ID: Rebuilt the bottom electrode during the PM From eenriquez at snf.stanford.edu Thu Oct 8 14:41:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:41:34 -0700 Subject: Comment stsetch2 SNF 2009-09-30 19:25:27: Update PM Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 14:41:41 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:41:41 -0700 Subject: Comment stsetch2 SNF 2009-10-02 15:55:07: Update PM Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 14:41:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:41:55 -0700 Subject: Comment stsetch2 SNF 2009-09-23 09:13:37: Schedule PM confirmed Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 14:42:10 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:42:10 -0700 Subject: Comment stsetch2 SNF 2009-09-25 14:11:23: Chamber lift ... Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 14:42:48 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:42:48 -0700 Subject: Comment stsetch2 SNF 2009-09-29 17:44:34: ran tool. works great!! Message-ID: Archived From eenriquez at snf.stanford.edu Thu Oct 8 14:43:12 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:43:12 -0700 Subject: Problem stsetch2 SNF 2009-09-22 12:30:12: wafer clamp is way off centered Message-ID: Performed annual PM From eenriquez at snf.stanford.edu Thu Oct 8 14:43:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Oct 2009 14:43:34 -0700 Subject: Comment stsetch2 SNF 2009-07-17 16:32:36: Results Message-ID: Archived From rostam at snf.stanford.edu Mon Oct 12 20:49:22 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 12 Oct 2009 20:49:22 -0700 Subject: Problem stsetch2 SNF 2009-10-12 20:49:21: plasma is NOT stable and turns off during purple cycle (I didn't know if it was etch or dep) Message-ID: From rostam at snf.stanford.edu Mon Oct 12 20:50:31 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 12 Oct 2009 20:50:31 -0700 Subject: Problem stsetch2 SNF 2009-10-12 20:50:30: plasma NOT stable Message-ID: plasma is NOT stable and turns off during purple cycle (I didn't know if it was etch or dep) From rostam at snf.stanford.edu Mon Oct 12 21:12:15 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Mon, 12 Oct 2009 21:12:15 -0700 Subject: Problem stsetch2 SNF 2009-10-12 21:12:13: tried 3 different SOI recipes. plasma turns off for all of them Message-ID: From mcvittie at snf.stanford.edu Tue Oct 13 14:05:18 2009 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 13 Oct 2009 14:05:18 -0700 Subject: Shutdown stsetch2 SNF 2009-10-13 14:05:17: shutdown to work in match network Message-ID: From mcvittie at snf.stanford.edu Wed Oct 14 11:20:57 2009 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 14 Oct 2009 11:20:57 -0700 Subject: Shutdown stsetch2 SNF 2009-10-13 14:05:17: shutdown to work in match network Message-ID: Adjustment of match network finished. No change in the level of blinking. Jim From rostam at snf.stanford.edu Wed Oct 14 17:15:56 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 14 Oct 2009 17:15:56 -0700 Subject: Problem stsetch2 SNF 2009-10-14 17:15:56: plasma still unstable Message-ID: From cbaxter at snf.stanford.edu Wed Oct 14 23:10:04 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 14 Oct 2009 23:10:04 -0700 Subject: Problem stsetch2 SNF 2009-10-14 23:10:04: Coil matching Message-ID: Tested system using "Smooth Shallow Template". Problem with coil match when switching from etch to dep. Put match to manual, found match spot for optimum for dep cycle (41%,57%) and ran test. Plasma was stable (did not flicker) but 350W reflective during etch. Then tried to find optimum etch tune point. But plasma always flicker with any change in % between cycle (even 2%). Suspect possible arcing or bushing problem in air caps because any movement in coil match causes flicker. Recommend checking the coil matching network air caps. Did all the test with Eric's help. From eenriquez at snf.stanford.edu Thu Oct 15 12:46:52 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 15 Oct 2009 12:46:52 -0700 Subject: Shutdown stsetch2 SNF 2009-10-15 12:46:52: Low cooling water flow Message-ID: From eenriquez at snf.stanford.edu Fri Oct 16 14:29:24 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 16 Oct 2009 14:29:24 -0700 Subject: Shutdown stsetch2 SNF 2009-10-15 12:46:52: Low cooling water flow Message-ID: Flushed out the chiller. Water flow is improved but still not to spec. Should be ok to run. We will replace the chiller on Monday. From mislam at snf.stanford.edu Sat Oct 17 14:35:59 2009 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Sat, 17 Oct 2009 14:35:59 -0700 Subject: Problem stsetch2 SNF 2009-10-17 14:35:58: No plasma during the dep (?) cycle Message-ID: Plasma flicker and/or fail to ignit during one of the cycle, appear to be dep (passivation) cycle. From cbaxter at snf.stanford.edu Sun Oct 18 23:56:07 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 18 Oct 2009 23:56:07 -0700 Subject: Shutdown stsetch2 SNF 2009-10-18 23:56:06: Coil matching problem Message-ID: Tried running the same recipe as the last user, but unable to strike plasma at dep step. The coil matching network could not match the chamber load. From eenriquez at snf.stanford.edu Tue Oct 20 14:49:17 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Oct 2009 14:49:17 -0700 Subject: Shutdown stsetch2 SNF 2009-10-18 23:56:06: Coil matching problem Message-ID: Replaced the coil chiller. Water resistivity ~ 1 Mohm. Ran Smooth-Shallow Template recipe. Plasma flickered once during each dep /etch cycle for about 1-2 sec. From eenriquez at snf.stanford.edu Fri Oct 23 09:17:33 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:17:33 -0700 Subject: Problem stsetch2 SNF 2009-10-17 14:35:58: No plasma during the dep (?) cycle Message-ID: Jim Mc. adjusted the matching network. Ran the Smooth-Shallow recipe with no plasma blink. Ran the Kevin-SOI recipe. Initially plasma blinked 3X at the start of the process. After adjusting the coil tune presets from 42/36 to 50/36, the plasma blinking was eliminated. From eenriquez at snf.stanford.edu Fri Oct 23 09:17:43 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:17:43 -0700 Subject: Problem stsetch2 SNF 2009-10-14 23:10:04: Coil matching Message-ID: Archived From eenriquez at snf.stanford.edu Fri Oct 23 09:17:49 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:17:49 -0700 Subject: Problem stsetch2 SNF 2009-10-14 17:15:56: plasma still unstable Message-ID: Jim Mc. adjusted the matching network. Ran the Smooth-Shallow recipe with no plasma blink. Ran the Kevin-SOI recipe. Initially plasma blinked 3X at the start of the process. After adjusting the coil tune presets from 42/36 to 50/36, the plasma blinking was eliminated. From eenriquez at snf.stanford.edu Fri Oct 23 09:17:55 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:17:55 -0700 Subject: Problem stsetch2 SNF 2009-10-12 21:12:13: tried 3 different SOI recipes. plasma turns off for all of them Message-ID: Jim Mc. adjusted the matching network. Ran the Smooth-Shallow recipe with no plasma blink. Ran the Kevin-SOI recipe. Initially plasma blinked 3X at the start of the process. After adjusting the coil tune presets from 42/36 to 50/36, the plasma blinking was eliminated. From eenriquez at snf.stanford.edu Fri Oct 23 09:18:03 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:18:03 -0700 Subject: Problem stsetch2 SNF 2009-10-12 20:50:30: plasma NOT stable Message-ID: Jim Mc. adjusted the matching network. Ran the Smooth-Shallow recipe with no plasma blink. Ran the Kevin-SOI recipe. Initially plasma blinked 3X at the start of the process. After adjusting the coil tune presets from 42/36 to 50/36, the plasma blinking was eliminated. From eenriquez at snf.stanford.edu Fri Oct 23 09:18:09 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:18:09 -0700 Subject: Problem stsetch2 SNF 2009-10-12 20:49:21: plasma is NOT stable and turns off during purple cycle (I didn't know if it was etch or dep) Message-ID: Jim Mc. adjusted the matching network. Ran the Smooth-Shallow recipe with no plasma blink. Ran the Kevin-SOI recipe. Initially plasma blinked 3X at the start of the process. After adjusting the coil tune presets from 42/36 to 50/36, the plasma blinking was eliminated. From eenriquez at snf.stanford.edu Fri Oct 23 09:18:24 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 23 Oct 2009 09:18:24 -0700 Subject: Comment stsetch2 SNF 2009-10-02 15:55:33: Need process qualification Message-ID: Jim Mc. adjusted the matching network. Ran the Smooth-Shallow recipe with no plasma blink. Ran the Kevin-SOI recipe. Initially plasma blinked 3X at the start of the process. After adjusting the coil tune presets from 42/36 to 50/36, the plasma blinking was eliminated. From rostam at snf.stanford.edu Sat Oct 24 00:59:56 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sat, 24 Oct 2009 00:59:56 -0700 Subject: Shutdown stsetch2 SNF 2009-10-24 00:59:56: unknown liquid (prob water) was flowing under the machine Message-ID: From jprovine at snf.stanford.edu Sat Oct 24 08:23:48 2009 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sat, 24 Oct 2009 08:23:48 -0700 Subject: Comment stsetch2 SNF 2009-10-24 08:23:48: liquid around stsetch2 Message-ID: the liquid has a pH of approximately 5-6 according to indicator tape, meaning it is mildly acidic and likely not just water. the spill seems contained currently (saturday 8am) by absorbers but it spilled beyond the previously left absorbers. i'll monitor while i'm in here to see if it continues to expand. sign posted indicating possible shock hazard from the liquid under a tool with HV. for this reason i did not attempt clean-up. From cbaxter at snf.stanford.edu Sun Oct 25 10:29:02 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 25 Oct 2009 10:29:02 -0700 Subject: Comment stsetch2 SNF 2009-10-25 10:29:01: Update Message-ID: Found the tool matching cover open and system powered down. need to find where the source of the leak coming from. From eenriquez at snf.stanford.edu Mon Oct 26 14:42:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Oct 2009 14:42:23 -0700 Subject: Shutdown stsetch2 SNF 2009-10-24 00:59:56: unknown liquid (prob water) was flowing under the machine Message-ID: Tightened two swagelock water fitings inside the matching network. Restarted the system. Had trouble getting the DeviceNet to reinitialize (heater section). Reset the heater controller. Had trouble restarting the turbo pump. Found the process cooling water had been turned off. Ran an O2 plasma for 15 minutes and also ran the Kevin SOI recipe with no problems. From eenriquez at snf.stanford.edu Mon Oct 26 14:43:27 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Oct 2009 14:43:27 -0700 Subject: Comment stsetch2 SNF 2009-10-24 08:23:48: liquid around stsetch2 Message-ID: Tightened two swagelock water fitings inside the matching network. Restarted the system. Had trouble getting the DeviceNet to reinitialize (heater section). Reset the heater controller. Had trouble restarting the turbo pump. Found the process cooling water had been turned off. Ran an O2 plasma for 15 minutes and also ran the Kevin SOI recipe with no problems. From eenriquez at snf.stanford.edu Mon Oct 26 14:43:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 26 Oct 2009 14:43:34 -0700 Subject: Comment stsetch2 SNF 2009-10-25 10:29:01: Update Message-ID: Archived From rostam at snf.stanford.edu Wed Oct 28 09:19:50 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 28 Oct 2009 09:19:50 -0700 Subject: Problem stsetch2 SNF 2009-10-28 09:19:49: errors Message-ID: magnetic confinement heater temperature rose above the warning limit insert heater temperature fell below the warning set point From eenriquez at snf.stanford.edu Wed Oct 28 09:35:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Oct 2009 09:35:23 -0700 Subject: Comment stsetch2 SNF 2009-10-28 09:35:22: Maintenance Message-ID: Removed the gas flow calibration verifier. From eenriquez at snf.stanford.edu Wed Oct 28 17:40:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 28 Oct 2009 17:40:34 -0700 Subject: Problem stsetch2 SNF 2009-10-28 09:19:49: errors Message-ID: Found heater circuit break for the chamber was tripped. Reset the breaker. From eenriquez at snf.stanford.edu Fri Oct 30 10:03:45 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Oct 2009 10:03:45 -0700 Subject: Comment stsetch2 SNF 2009-10-28 09:35:22: Maintenance Message-ID: Archived From eenriquez at snf.stanford.edu Fri Oct 30 10:07:34 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Oct 2009 10:07:34 -0700 Subject: Comment stsetch2 SNF 2009-10-30 10:07:33: Update water flow switch Message-ID: Replaced the defective coil water flow switch. Verified that the RF power is shut off when the coil water flow is interrupted.