From rostam at snf.stanford.edu Wed Sep 2 21:13:33 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 2 Sep 2009 21:13:33 -0700 Subject: Shutdown stsetch2 SNF 2009-09-02 21:13:33: red alarm: module control Message-ID: module control unable to download recipe because a critical error was encountered during downloads: please look at the recipe downloader componenet for more info From mmessana at snf.stanford.edu Thu Sep 3 10:04:18 2009 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Thu, 3 Sep 2009 10:04:18 -0700 Subject: Comment stsetch2 SNF 2009-09-03 10:04:18: recipe downloader Message-ID: I got the same error as rostam when I created a new recipe. For some reason it did not want to download. Other recipes would download no problem. I recreated the recipe and everything was fine. From eenriquez at snf.stanford.edu Thu Sep 3 10:52:58 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Sep 2009 10:52:58 -0700 Subject: Shutdown stsetch2 SNF 2009-09-02 21:13:33: red alarm: module control Message-ID: No problem found. Downloaded two recipes (maintenance O2 and Rostam SOI) with no problems. From mmessana at snf.stanford.edu Sat Sep 12 21:36:07 2009 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Sat, 12 Sep 2009 21:36:07 -0700 Subject: Problem stsetch2 SNF 2009-09-12 21:36:07: fails on high leak rate Message-ID: tried several wafers and different recipes. before starting recipe, fails due to leak rate being 400 instead of less than 25. retrying just gives same result. used this same recipe friday night without problems. From mmessana at snf.stanford.edu Sat Sep 12 22:00:47 2009 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Sat, 12 Sep 2009 22:00:47 -0700 Subject: Comment stsetch2 SNF 2009-09-12 22:00:46: related to above note Message-ID: According to the log, it appears previous user (this morning) had the same problem and never wrote it up. From rostam at snf.stanford.edu Sun Sep 13 19:01:54 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 13 Sep 2009 19:01:54 -0700 Subject: Problem stsetch2 SNF 2009-09-13 19:01:53: red alarm : backside gas leak Message-ID: backside gas leak set point 25 mT/min. measured 413 mT/min. From rostam at snf.stanford.edu Sun Sep 13 19:16:35 2009 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Sun, 13 Sep 2009 19:16:35 -0700 Subject: Shutdown stsetch2 SNF 2009-09-13 19:16:35: backside gas leak Message-ID: I double checked backside of my wafers to be completely clean. I received the red alarm again. red alarm: backside gas leak above the alarm set point. setpoint 25 mTorr/min, measured 404 mTorr/min From eenriquez at snf.stanford.edu Mon Sep 14 10:38:23 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Sep 2009 10:38:23 -0700 Subject: Problem stsetch2 SNF 2009-09-12 21:36:07: fails on high leak rate Message-ID: Replaced the backside He cooling oring (lip seal) and cleaned the platten. Ran an O2 plasma for about 30 min. He leak rate was 20 mT/min. From eenriquez at snf.stanford.edu Mon Sep 14 10:38:28 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Sep 2009 10:38:28 -0700 Subject: Shutdown stsetch2 SNF 2009-09-13 19:16:35: backside gas leak Message-ID: Replaced the backside He cooling oring (lip seal) and cleaned the platten. Ran an O2 plasma for about 30 min. He leak rate was 20 mT/min. From eenriquez at snf.stanford.edu Mon Sep 14 10:38:36 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Sep 2009 10:38:36 -0700 Subject: Problem stsetch2 SNF 2009-09-13 19:01:53: red alarm : backside gas leak Message-ID: Replaced the backside He cooling oring (lip seal) and cleaned the platten. Ran an O2 plasma for about 30 min. He leak rate was 20 mT/min. From eenriquez at snf.stanford.edu Mon Sep 14 10:39:15 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Sep 2009 10:39:15 -0700 Subject: Comment stsetch2 SNF 2009-09-12 22:00:46: related to above note Message-ID: Archived From grahamab at snf.stanford.edu Mon Sep 14 11:57:00 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 14 Sep 2009 11:57:00 -0700 Subject: Problem stsetch2 SNF 2009-09-14 11:56:59: more helium leak rate alarms Message-ID: first wafer ran fine. 2nd wafer alarmed prior to starting recipe for being right at the limit. 3rd wafer alarmed for being slightly over the limit before starting the recipe. retrying worked and recipe ran, but trending toward getting worse....still much less than the 400+ values seen over the weekend From damodei at snf.stanford.edu Fri Sep 18 02:16:37 2009 From: damodei at snf.stanford.edu (damodei at snf.stanford.edu) Date: Fri, 18 Sep 2009 02:16:37 -0700 Subject: Shutdown stsetch2 SNF 2009-09-18 02:16:37: Broken Wafer in Chamber Message-ID: Observed very high helium leak rate (as previous users did) and wafer then broke in chamber. Wafer was a fusion bonded wafer but total thickness was near that of a standard wafer (600 um) and its use was cleared with a senior labmember. From mdickey at snf.stanford.edu Fri Sep 18 10:16:16 2009 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 18 Sep 2009 10:16:16 -0700 Subject: Shutdown stsetch2 SNF 2009-09-18 02:16:37: Broken Wafer in Chamber Message-ID: Recovered wafer and cycled a wafer without problems From mtan at snf.stanford.edu Fri Sep 18 18:01:04 2009 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 18 Sep 2009 18:01:04 -0700 Subject: Problem stsetch2 SNF 2009-09-18 18:01:03: failed leak check Message-ID: From mtan at snf.stanford.edu Fri Sep 18 18:32:24 2009 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 18 Sep 2009 18:32:24 -0700 Subject: Problem stsetch2 SNF 2009-09-18 18:32:24: failed leak check Message-ID: process not operable after repeated attempts From mmessana at snf.stanford.edu Mon Sep 21 13:47:47 2009 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Mon, 21 Sep 2009 13:47:47 -0700 Subject: Problem stsetch2 SNF 2009-09-21 13:47:44: failing leak check Message-ID: system is still failing leak check. when I retry, it works, but still fails every time on the first attempt. From xzhuan1 at snf.stanford.edu Tue Sep 22 12:30:12 2009 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Tue, 22 Sep 2009 12:30:12 -0700 Subject: Problem stsetch2 SNF 2009-09-22 12:30:12: wafer clamp is way off centered Message-ID: From eenriquez at snf.stanford.edu Wed Sep 23 09:13:37 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Sep 2009 09:13:37 -0700 Subject: Comment stsetch2 SNF 2009-09-23 09:13:37: Schedule PM confirmed Message-ID: Two STS field service engineer wil be here week from Mon - Fri. From mtan at snf.stanford.edu Fri Sep 25 12:06:13 2009 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 25 Sep 2009 12:06:13 -0700 Subject: Problem stsetch2 SNF 2009-09-25 12:06:13: failed leak test Message-ID: From shott at snf.stanford.edu Fri Sep 25 14:11:24 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 25 Sep 2009 14:11:24 -0700 Subject: Comment stsetch2 SNF 2009-09-25 14:11:23: Chamber lift ... Message-ID: I went to look at the portable gantry crane at AAA rental. While it may work, it's biggest liability is it's overhead clearance. The horizontal bar is at 6' 10". The chamber top is at about 5' 2". That doesn't leave a heck of a lot of clearance for the chain hoist plus a yoke of chains to connect to the eyebolts. I found something that may work better .... at Redwood City Rental (although they may also have one at AAA: An engine hoist. The one that I looked at has removable legs (so that we don't have to maneuver the thing ... we can assemble in place) that have a lateral clearance of slightly more than 36". The stsetch2 is only a little more than 24" deep. Plus, it will go higher and has a built-in hydraulic lifting mechanism. Plus it's cheaper: $30 per day instead of $120 for the gantry crane plus an additional $20 for the chain hoist. As this can be disassembled, it can be picked up and returned in the company truck. Thanks, John From grahamab at snf.stanford.edu Tue Sep 29 17:44:36 2009 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 29 Sep 2009 17:44:36 -0700 Subject: Comment stsetch2 SNF 2009-09-29 17:44:34: ran tool. works great!! Message-ID: saw it was yellow and figured it was back up. leak rate was a bit high, but no footing and etch rate has increased slightly. woohoo!! From eenriquez at snf.stanford.edu Wed Sep 30 19:14:15 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Sep 2009 19:14:15 -0700 Subject: Shutdown stsetch2 SNF 2009-09-30 19:14:14: Annual PM Message-ID: From eenriquez at snf.stanford.edu Wed Sep 30 19:25:28 2009 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 30 Sep 2009 19:25:28 -0700 Subject: Comment stsetch2 SNF 2009-09-30 19:25:27: Update PM Message-ID: Most of the chamber parts have been replaced and reassemble. System is under vacuum. The heaters have been turned on. The last leak up rate = 38 mT/min. One of the electrode's thermal gaskets was damaged during disassembly and a replacement part is 3 -5 weeks away. We ordered a new gasket but in the mean time, we will reuse the old gasket . We will verify the electrode's temperature and thermal uniformity meets STS specifications.