Shutdown stsetch2 SNF 2009-09-13 19:16:35: backside gas leak

rostam at snf.stanford.edu rostam at snf.stanford.edu
Sun Sep 13 19:16:35 PDT 2009


I double checked backside of my wafers to be completely clean. I received the red alarm again.
red alarm:
backside gas leak above the alarm set point. setpoint 25 mTorr/min, measured 404 mTorr/min




More information about the stsetch2-pcs mailing list