Problem stsetch2 SNF 2009-09-12 21:36:07: fails on high leak rate

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 14 10:38:23 PDT 2009


Replaced the backside He cooling oring (lip seal) and cleaned the platten.  Ran an O2 plasma for about 30 min. He leak rate was 20 mT/min.




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