Problem stsetch2 SNF 2009-09-13 19:01:53: red alarm : backside gas leak
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Sep 14 10:38:36 PDT 2009
Replaced the backside He cooling oring (lip seal) and cleaned the platten. Ran an O2 plasma for about 30 min. He leak rate was 20 mT/min.
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