Problem stsetch2 SNF 2009-09-13 19:01:53: red alarm : backside gas leak

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 14 10:38:36 PDT 2009


Replaced the backside He cooling oring (lip seal) and cleaned the platten.  Ran an O2 plasma for about 30 min. He leak rate was 20 mT/min.




More information about the stsetch2-pcs mailing list