Problem stsetch2 SNF 2009-09-14 11:56:59: more helium leak rate alarms

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Mon Sep 14 11:57:00 PDT 2009


first wafer ran fine.  2nd wafer alarmed prior to starting recipe for being right at the limit.  3rd wafer alarmed for being slightly over the limit before starting the recipe.  retrying worked and recipe ran, but trending toward getting worse....still much less than the 400+ values seen over the weekend




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