Shutdown stsetch2 SNF 2009-09-18 02:16:37: Broken Wafer in Chamber

damodei at snf.stanford.edu damodei at snf.stanford.edu
Fri Sep 18 02:16:37 PDT 2009


Observed very high helium leak rate (as previous users did) and wafer then broke in chamber.  Wafer was a fusion bonded wafer but total thickness was near that of a standard wafer (600 um) and its use was cleared with a senior labmember.




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