Shutdown stsetch2 SNF 2009-09-18 02:16:37: Broken Wafer in Chamber
mdickey at snf.stanford.edu
mdickey at snf.stanford.edu
Fri Sep 18 10:16:16 PDT 2009
Recovered wafer and cycled a wafer without problems
More information about the stsetch2-pcs
mailing list