Problem stsetch2 SNF 2010-04-05 23:21:52: Plasma blinks

jjeong1 at snf.stanford.edu jjeong1 at snf.stanford.edu
Mon Apr 5 23:21:52 PDT 2010


Tried to do SF6 isotropic etching using a power of 2000W. But the power level in 13.56MHz coil was not uniform. Instead, it fluctuated from 633W to 2000W and plasma was not stable. 
Also, it says that coil matching unit load position fell below the warning level specified in the tolerance recipe. 




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