Problem stsetch2 SNF 2010-04-03 21:51:46: wafer stuck in the chamber

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Tue Apr 6 13:54:07 PDT 2010


This should have been a shutdown. User (bdai) will be warned that this is unacceptable.
   Jim  




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