Shutdown stsetch2 SNF 2010-04-26 16:40:10: unable to unload dummy wafer

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Apr 27 13:07:23 PDT 2010


Reset the turbo controller and pump down the chamber.  Unloaded and reloaded the user's wafers with no problem.




More information about the stsetch2-pcs mailing list