Shutdown stsetch2 SNF 2010-04-27 22:30:23: Can't load wafers
jjeong1 at snf.stanford.edu
jjeong1 at snf.stanford.edu
Tue Apr 27 22:30:24 PDT 2010
It says that the chamber pressure is too high.
Can't load a wafer and can't start the process.
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