Shutdown stsetch2 SNF 2010-04-27 22:30:23: Can't load wafers

jjeong1 at snf.stanford.edu jjeong1 at snf.stanford.edu
Tue Apr 27 22:30:24 PDT 2010


It says that the chamber pressure is too high. 
Can't load a wafer and can't start the process.




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