Problem stsetch2 SNF 2010-08-30 21:12:00: Error Report

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Mon Aug 30 21:12:01 PDT 2010


Every time a wafer was run the machine reported an error with the 13.56 coil at least once. This is happening much more frequently than in the past.




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