From minchieh at snf.stanford.edu Thu Dec 2 10:46:20 2010 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Thu, 2 Dec 2010 10:46:20 -0800 Subject: Problem stsetch2 SNF 2010-12-02 10:46:19: Lost a 0.5 x 2 cm silicon piece Message-ID: One side of my wafer cracks and the wafer I took of has about 0.5 x 2 cm piece gone. Wafer process finished & wafer was transferred out normally. I am not sure whether this would afftect the process; will contact Elmer. From minchieh at snf.stanford.edu Thu Dec 2 11:59:36 2010 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Thu, 2 Dec 2010 11:59:36 -0800 Subject: Shutdown stsetch2 SNF 2010-12-02 11:59:36: piece in the etch chamber Message-ID: From eenriquez at snf.stanford.edu Thu Dec 2 12:47:08 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Dec 2010 12:47:08 -0800 Subject: Shutdown stsetch2 SNF 2010-12-02 11:59:36: piece in the etch chamber Message-ID: recovered the wafer pieces. From eenriquez at snf.stanford.edu Thu Dec 2 12:47:19 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 2 Dec 2010 12:47:19 -0800 Subject: Problem stsetch2 SNF 2010-12-02 10:46:19: Lost a 0.5 x 2 cm silicon piece Message-ID: recovered the wafer pieces. From mcvittie at snf.stanford.edu Tue Dec 7 10:09:14 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 7 Dec 2010 10:09:14 -0800 Subject: Comment stsetch2 SNF 2010-12-07 10:09:14: STS2 Process Pressures Have Dropped by Almost 2X Message-ID: Hi, For processes with fixed throttle valve positions, the process pressures are now almost half of what they use to be. If this real, it is a sifnificant problem. Etch rates will be down and Sel will be up. I have asked Elmer to look at the problem. The thing to do is to check the process readout calibration. Jim From mcvittie at snf.stanford.edu Tue Dec 7 17:34:16 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 7 Dec 2010 17:34:16 -0800 Subject: Shutdown stsetch2 SNF 2010-12-07 17:34:16: STS2 Loader need to be reset Message-ID: Reset system to solve prossure control problem. Loader came up in wrong state. Elmer knows how to reset it. Jim From eenriquez at snf.stanford.edu Wed Dec 8 12:15:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 8 Dec 2010 12:15:10 -0800 Subject: Shutdown stsetch2 SNF 2010-12-07 17:34:16: STS2 Loader need to be reset Message-ID: Reset the loader. Cycled wafers with no problems. From mcvittie at snf.stanford.edu Thu Dec 9 02:38:31 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 9 Dec 2010 02:38:31 -0800 Subject: Comment stsetch2 SNF 2010-12-09 02:38:30: Turbo Pump went Off agian for no reason Jim Message-ID: From mcvittie at snf.stanford.edu Thu Dec 9 02:41:11 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 9 Dec 2010 02:41:11 -0800 Subject: Comment stsetch2 SNF 2010-12-09 02:41:10: STS2 -- I am seeing lots of drop out again Message-ID: I will if I can work on the match network next week. I am seeing that a number of the recipe are having inital matching problems and need to have their tune and load presets improved. Jim From mcvittie at snf.stanford.edu Mon Dec 13 18:11:35 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Mon, 13 Dec 2010 18:11:35 -0800 Subject: Comment stsetch2 SNF 2010-12-13 18:11:34: turbo pump shut dw again Message-ID: Turbo shut dw twice, before after loading wafer. Again the 1st fault was the backing pump. Looking at log, I see it also shut dw yesterday. We need to find the cause. Jim