Problem stsetch2 SNF 2010-12-02 10:46:19: Lost a 0.5 x 2 cm silicon piece
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Dec 2 12:47:19 PST 2010
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Problem stsetch2 SNF 2010-12-02 10:46:19: Lost a 0.5 x 2 cm silicon piece
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Shutdown stsetch2 SNF 2010-12-02 11:59:36: piece in the etch chamber
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recovered the wafer pieces.
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Problem stsetch2 SNF 2010-12-02 10:46:19: Lost a 0.5 x 2 cm silicon piece
Next message:
Shutdown stsetch2 SNF 2010-12-02 11:59:36: piece in the etch chamber
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