Comment stsetch2 SNF 2010-12-07 10:09:14: STS2 Process Pressures Have Dropped by Almost 2X

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Tue Dec 7 10:09:14 PST 2010


Hi,
For processes with fixed throttle valve positions, the process  pressures are now almost half of what they use to be. If this real, it is a sifnificant problem. Etch rates will be down and Sel will be up.  I have asked Elmer to look at the problem. The thing to do is to check the process readout calibration.     Jim




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