Comment stsetch2 SNF 2010-12-13 18:11:34: turbo pump shut dw again

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Mon Dec 13 18:11:35 PST 2010


Turbo shut dw twice, before after loading wafer. Again the 1st fault was the backing pump. Looking at log, I see it also shut dw yesterday. We need to find the cause.    Jim 




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