Shutdown stsetch2 SNF 2010-01-19 11:48:41: Heater problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Feb 9 13:11:13 PST 2010


Replaced one buss control module and two loop modules.  The old buss control module had over heater .  Wet cleaned the electrode.  Ran O2 plasma and ran the smooth shallow template recipe with no problems.




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