From eenriquez at snf.stanford.edu  Mon Jan  4 15:06:34 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 4 Jan 2010 15:06:34 -0800
Subject: Comment stsetch2 SNF 2010-01-04 15:06:33: Test OK
Message-ID: <mailman.718.1356283389.4670.stsetch2-pcs@snf.stanford.edu>

Reload the software because of loading problem.  Cycled 4 wafers with no problems after the reload.



From mcvittie at snf.stanford.edu  Mon Jan 11 14:30:54 2010
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Mon, 11 Jan 2010 14:30:54 -0800
Subject: Shutdown stsetch2 SNF 2010-01-11 14:30:53: STS2 Platen is not tuning,  Jim 
Message-ID: <mailman.719.1356283389.4670.stsetch2-pcs@snf.stanford.edu>




From mcvittie at snf.stanford.edu  Tue Jan 12 12:25:48 2010
From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu)
Date: Tue, 12 Jan 2010 12:25:48 -0800
Subject: Shutdown stsetch2 SNF 2010-01-11 14:30:53: STS2 Platen is not tuning,  Jim 
Message-ID: <mailman.720.1356283389.4670.stsetch2-pcs@snf.stanford.edu>

It is a recipe problem. My plasma stability recipe has the problem but my test-1 recipe does not.  I will let you know what the problem after I determine the cause.  Jim



From eenriquez at snf.stanford.edu  Tue Jan 19 11:47:40 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 19 Jan 2010 11:47:40 -0800
Subject: Comment stsetch2 SNF 2010-01-04 15:06:33: Test OK
Message-ID: <mailman.721.1356283389.4670.stsetch2-pcs@snf.stanford.edu>

Archive



From eenriquez at snf.stanford.edu  Tue Jan 19 11:48:42 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 19 Jan 2010 11:48:42 -0800
Subject: Shutdown stsetch2 SNF 2010-01-19 11:48:41: Heater problem
Message-ID: <mailman.722.1356283389.4670.stsetch2-pcs@snf.stanford.edu>

Bad TC reading from heaters.  



From eenriquez at snf.stanford.edu  Thu Jan 21 13:46:53 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Thu, 21 Jan 2010 13:46:53 -0800
Subject: Comment stsetch2 SNF 2010-01-21 13:46:52: Update 
Message-ID: <mailman.723.1356283389.4670.stsetch2-pcs@snf.stanford.edu>

Order new temperature controller.  Should be here early next week.



From eenriquez at snf.stanford.edu  Tue Jan 26 15:35:21 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 26 Jan 2010 15:35:21 -0800
Subject: Comment stsetch2 SNF 2010-01-26 15:35:21: Update
Message-ID: <mailman.724.1356283389.4670.stsetch2-pcs@snf.stanford.edu>

Installed new controller but it did not fix the problems.  Called STS about field service availability.  They will have an answer tomorrow.



From eenriquez at snf.stanford.edu  Fri Jan 29 11:41:44 2010
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Fri, 29 Jan 2010 11:41:44 -0800
Subject: Comment stsetch2 SNF 2010-01-29 11:41:42: Update
Message-ID: <mailman.725.1356283389.4670.stsetch2-pcs@snf.stanford.edu>

Heater controller's configuration files have been corrupted.  Waiting for original files from the UK.  Also, there is a good chance that field service can be here next week