From eenriquez at snf.stanford.edu Tue Jun 1 14:48:21 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Jun 2010 14:48:21 -0700 Subject: Comment stsetch2 SNF 2010-06-01 14:48:21: Update Message-ID: Field service is here. Now working on hanling issues. From shott at snf.stanford.edu Tue Jun 1 16:57:11 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 1 Jun 2010 16:57:11 -0700 Subject: Comment stsetch2 SNF 2010-06-01 14:48:21: Update Message-ID: Frank Monano from STS worked on the wafer alignment. The laser that controls the rotation of the carousel was adjusted so that the left end (when facing the machine) is about 1.5 mm closer than it was. Based on both examination of the backside of wafers in carousel position number 1 and position number 2 as well as observation of the "shadow" of the wafer clamp on the top surface. the alignment is much better than it was. We unloaded at least 6 wafers in each of the two carousel positions and did not observe any of the wafer sliding in the carousel position that others have observed. Frank believes that we may have to adjust the position of the reed switch that senses when the pins are fully lifted. He believes that this switch may be set a bit too low so that the switch engages before the pins are fully up (which triggers the outward motion of the carousel. We will look at this further tomorrow and will also look at the resettable RF error. If the chamber needs to be opened, the top O-ring will be replaced. John From shott at snf.stanford.edu Tue Jun 1 16:58:16 2010 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 1 Jun 2010 16:58:16 -0700 Subject: Shutdown stsetch2 SNF 2010-05-31 09:21:49: Unload operation from the chamber failed Message-ID: Frank Monano from STS worked on the wafer alignment. The laser that controls the rotation of the carousel was adjusted so that the left end (when facing the machine) is about 1.5 mm closer than it was. Based on both examination of the backside of wafers in carousel position number 1 and position number 2 as well as observation of the "shadow" of the wafer clamp on the top surface. the alignment is much better than it was. We unloaded at least 6 wafers in each of the two carousel positions and did not observe any of the wafer sliding in the carousel position that others have observed. Frank believes that we may have to adjust the position of the reed switch that senses when the pins are fully lifted. He believes that this switch may be set a bit too low so that the switch engages before the pins are fully up (which triggers the outward motion of the carousel. We will look at this further tomorrow and will also look at the resettable RF error. If the chamber needs to be opened, the top O-ring will be replaced. John From rostam at snf.stanford.edu Tue Jun 1 21:27:48 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 1 Jun 2010 21:27:48 -0700 Subject: Problem stsetch2 SNF 2010-06-01 21:27:47: caution: high reflected power might occur Message-ID: From rostam at snf.stanford.edu Wed Jun 2 05:19:38 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 2 Jun 2010 05:19:38 -0700 Subject: Shutdown stsetch2 SNF 2010-06-02 05:19:37: wafer handler problem Message-ID: wafer handler couldn't load my wafer into the chamber and came back with the wafer hanging from it (4:57am). I collected my wafers from the load lock and pumped down the load lock empty. manually transfered the imaginary wafer from the chamber to the load lock. the machine can't detect a wafer in the load lock and thinks there is a wafer missing and doesn't shut the gate valve between the chamber and load lock. I've collected all my wafers from the machine. there is no wafer inside the load lock or chamber. From rostam at snf.stanford.edu Wed Jun 2 08:39:07 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 2 Jun 2010 08:39:07 -0700 Subject: Problem stsetch2 SNF 2010-06-02 08:39:07: wafer handling problem again Message-ID: From mdickey at snf.stanford.edu Tue Jun 8 07:37:23 2010 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 8 Jun 2010 07:37:23 -0700 Subject: Comment stsetch2 SNF 2010-06-08 07:37:22: valve Message-ID: Waiting for ball valve on order for the chiller From eenriquez at snf.stanford.edu Wed Jun 9 10:17:11 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 10:17:11 -0700 Subject: Comment stsetch2 SNF 2010-06-08 07:37:22: valve Message-ID: Replaced the leaky ball valve. From eenriquez at snf.stanford.edu Wed Jun 9 10:22:39 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 10:22:39 -0700 Subject: Shutdown stsetch2 SNF 2010-06-02 05:19:37: wafer handler problem Message-ID: Field service completed repair work. For the rf power drop out problem, he zeroed the matching network gain potentiometers. For the loading problem, he lubricated the wafer lift and adjusted its speed. Repaired the ceramic outer shield using ceramic cement. A new shield is on order. From eenriquez at snf.stanford.edu Wed Jun 9 10:23:03 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Jun 2010 10:23:03 -0700 Subject: Problem stsetch2 SNF 2010-06-02 08:39:07: wafer handling problem again Message-ID: Field service completed his work. From srikantv at snf.stanford.edu Thu Jun 10 14:20:54 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Thu, 10 Jun 2010 14:20:54 -0700 Subject: Shutdown stsetch2 SNF 2010-06-10 14:20:53: unable to download recipe Message-ID: recipe downloader faults and unable to download recipe to start etch Jim & Elmer saw the problem and are aware of it. From eenriquez at snf.stanford.edu Mon Jun 14 08:38:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jun 2010 08:38:09 -0700 Subject: Shutdown stsetch2 SNF 2010-06-10 14:20:53: unable to download recipe Message-ID: Was unable to download recipes because the name of the Standard Tolerance recipes had been changed to Standard Tolerance (old ...). Process recipes had been set up with the Standard Tolerance recipes so the downloader program was confused when it was unable to find the exact name of the tolerance recipe. From eenriquez at snf.stanford.edu Mon Jun 14 08:39:07 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 14 Jun 2010 08:39:07 -0700 Subject: Shutdown stsetch2 SNF 2010-06-14 08:39:07: Jim RF work Message-ID: Jim is trying to improved the rf tuning. From mcvittie at snf.stanford.edu Mon Jun 14 13:24:12 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Mon, 14 Jun 2010 13:24:12 -0700 Subject: Shutdown stsetch2 SNF 2010-06-14 08:39:07: Jim RF work Message-ID: I set the Low Frq Rf duty cycle at 33% (5 ms on and 10ms off). For SOI processes, you need to remember to check the pulse enble mode box on the 380KHz setup page in your recipe. If you do not check this box, you will get poor resist selectivity. Jim From rostam at snf.stanford.edu Tue Jun 15 20:38:55 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Tue, 15 Jun 2010 20:38:55 -0700 Subject: Shutdown stsetch2 SNF 2010-06-15 20:38:54: Message-ID: From eenriquez at snf.stanford.edu Wed Jun 16 19:08:37 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Jun 2010 19:08:37 -0700 Subject: Comment stsetch2 SNF 2010-06-16 19:08:36: Update Message-ID: System software is unable to communicate with the OPC server named Rslinx. This fault makes the system unusable. Restored files that had been moved and power cycled the system. Still the same problem. Emailed a detailed report of the errors to STS technical support. They have not encountered this error before and will have to contact their software engineers. We talked about having them connect remotely to the system but still need to work out the time. From eenriquez at snf.stanford.edu Thu Jun 24 09:15:37 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jun 2010 09:15:37 -0700 Subject: Comment stsetch2 SNF 2010-06-24 09:15:37: Update Message-ID: Great news. Worked with the software engineer (Rhys) from the UK and he was able to download two missing files : Eversi.sys and 386swap.par. Now pumpdown the chamber and will continue to restart and test the system. From eenriquez at snf.stanford.edu Thu Jun 24 11:16:38 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jun 2010 11:16:38 -0700 Subject: Comment stsetch2 SNF 2010-06-24 11:16:38: Update Message-ID: Now running two test wafers. From eenriquez at snf.stanford.edu Thu Jun 24 13:38:57 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jun 2010 13:38:57 -0700 Subject: Problem stsetch2 SNF 2010-06-24 13:38:57: Loadlock not pumping down Message-ID: Pumps down to only 120 mT and unable to transfer wafer. From eenriquez at snf.stanford.edu Thu Jun 24 13:40:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jun 2010 13:40:24 -0700 Subject: Problem stsetch2 SNF 2010-06-24 13:38:57: Loadlock not pumping down Message-ID: Found a piece of tape across the loadlock o-ring. Most likely from a sign that was taped on top of the LL lid. From eenriquez at snf.stanford.edu Thu Jun 24 13:48:51 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jun 2010 13:48:51 -0700 Subject: Shutdown stsetch2 SNF 2010-06-15 20:38:54: Message-ID: STS software support restore two missing files related to RSlinx licensing (eversi.sys and 386swap.par). From eenriquez at snf.stanford.edu Thu Jun 24 13:49:07 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jun 2010 13:49:07 -0700 Subject: Comment stsetch2 SNF 2010-06-16 19:08:36: Update Message-ID: Archive From eenriquez at snf.stanford.edu Thu Jun 24 13:49:24 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Jun 2010 13:49:24 -0700 Subject: Comment stsetch2 SNF 2010-06-24 09:15:37: Update Message-ID: Archived From rostam at snf.stanford.edu Fri Jun 25 00:44:16 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 25 Jun 2010 00:44:16 -0700 Subject: Problem stsetch2 SNF 2010-06-25 00:44:16: LLC error Message-ID: sometimes when the carousel is rotating to put the wafer inside the chamber, it stops half-way and LLC error occurs. You have to abort the error and press the Abort recipe, HRM1 Abort, and TMC Abort, then vent the chamber, pump the chamber and try again. From mtan at snf.stanford.edu Fri Jun 25 11:39:20 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 25 Jun 2010 11:39:20 -0700 Subject: Shutdown stsetch2 SNF 2010-06-25 11:39:18: handler detector fault Message-ID: The machine couldn't get the correct table of index. Could not load wafer into the machine. From mcvittie at snf.stanford.edu Fri Jun 25 13:42:40 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 25 Jun 2010 13:42:40 -0700 Subject: Shutdown stsetch2 SNF 2010-06-25 11:39:18: handler detector fault Message-ID: Remapping solved problem. Jim From srikantv at snf.stanford.edu Sat Jun 26 22:35:12 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Sat, 26 Jun 2010 22:35:12 -0700 Subject: Shutdown stsetch2 SNF 2010-06-26 22:35:11: wafer stuck in chamber Message-ID: Machine stalled in middle of recipe. After aborting process, not able to unload wafer. Pressure is stuck at 131mT (possible reason?) Please unload wafer into cassette. From mcvittie at snf.stanford.edu Tue Jun 29 15:50:05 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 29 Jun 2010 15:50:05 -0700 Subject: Shutdown stsetch2 SNF 2010-06-26 22:35:11: wafer stuck in chamber Message-ID: Both the turbo pump and backing pumps were off. There was a PLC fault. Resetting the PLC multiple times solved the problem. Jim